Function_Vapor

Application: Determine Vapor Plume

How vapor flux of a material emanates from a source is characteristic of the material, and it also depends on the method and conditions under which the material is vaporized.

In Tin Model programs, the plume function of a vapor source is defined by a 3-term polynomial, which encompasses nearly all observed emission patterns from physical phenomena including evaporation, magnetron sputtering, and ion-beam sputtering.

If the plume function of a source is known one can simply enter it into the program.

If the plume function is unknown, a routine is available in the program for users to extract the plume function from experimentally measured data that cover an angle span of the source.

With a realistic plume function one can predict the outcome of a deposition process with great accuracy.

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